Data Sheets
Aluminum
Al, 99.999% pure, Sputtering Targets
Scope:
This product data sheet characterizes Fine Grain Process Aluminum sputtering
targets sold by SCI Engineered Materials (SCI). The following information
is not a specification; however, it may prove useful to the customer in
developing a formal product specification.
General Description:
SCI’s Fine Grain Process Aluminum sputtering targets can be produced
in various sizes and shapes. Their microstructural uniformity and fine
grain consistency produce excellent results in most thin film applications.
Custom dopants can be added and higher purities are available upon request.
Bonding:
Fine Grain Process Aluminum sputtering targets produced by SCI can be
bonded to customer supplied backing plates. SCI also supplies backing
plates upon request. SCI provides several bonding processes to ensure
adequate mechanical strength, thermal transfer, and superior electrical
conductivity.
Cleaning & Packaging:
A high purity solvent is used to clean and rinse the targets. The entire
target assembly is sealed in vacuum poly bags and securely packed into
SCI or customer supplied shipping containers.
Documentation:
A Certificate of Analysis and Material Safety Data Sheet and are included
with each target.
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