Data Sheets
LaCaMnO Target
Scope:
This product data sheet characterizes Lanthanum Calcium Manganate Oxide
(La-Ca-Mn-O 99.9%) targets produced by SCI Engineered Materials (SCI).
The following information is not a specification; however, it may prove
useful to the customer in developing a formal product specification.
General Description:
SCI offers Lanthanum Calcium Manganate Oxide (La-Ca-Mn-O) targets manufactured
using sub-micron, typically nano-meter sized, powders. These powders are
fabricated by a chemical process which yeilds phase pure, homogeneous,
nanometer size, particles. These particles are useful in the densification
of the material and typically contribute to the fine grain structure of
the finished target.
Targets are produced by a CIP/Sinter process. In a typical CIP/Sinter
process, phase pure powders are pressed uniaxially to a desired shape
and then pressed isostatically (CIP). The green part is then sintered
in a controlled atmosphere to achieve the desired density and grain size.
The sintered part is machined and generally bonded to a Copper cup/plate
to produce sputtering targets. Targets for laser ablation are not bonded.
The targets produced by this process are phase pure with grain size of
a few microns. Targets with standard composition of La0.67Ca0.33MnOx are
generally offered. However, targets with customized stochiometry and dopings
are also available on request.
For quality control purposes, a coupon target is generally
fabricated. The coupon target is characterized for phase purity by standard
X-ray diffraction technique. The microstructure of the coupon target is
then investigated using Scanning electron microscopy (SEM) and Energy
dispersive X-ray specroscopy (EDX) techniques.
Handling Instructions:
The targets should always be stored under vacuum. The targets are shipped
in vacuum sealed polythene bags for your convenience. The targets may
require periodic cleaning between depositions. It should never be touched
with bare hands. For other information, please refer to MSDS sheet.
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